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MEMS Methodology
Publication Date: April 2005
Citing URL: http://esi-topics.com/mems

MEMS

The baseline time span for this database is 1994-2004 (sixth bimonthly. The resulting database contained 3,906 (10 years) and  1,823 (2 years) papers; 8,497 authors; 57 countries; 606 journals; and 1,638 institutions. Read the methodology used to create this special topic.
M
Top Papers
•  Top 20 papers overall
1994-2004 (sixth bimonthly)
•  Map of top 13 papers
1994-2004 (sixth bimonthly)
•  Top 20 papers published in the last two years
1994-2004 (sixth bimonthly)
Top Authors
Top 20 overall
1994-2004 (sixth bimonthly)
Top Institutions
Top 20 overall
1994-2004 (sixth bimonthly)
Top Nations
Top 20 overall
1994-2004 (sixth bimonthly)
Top Journals
Top 20 overall
1994-2004 (sixth bimonthly)
Time Series
1 year
5 year
Field Distribution
Field representation
1994-2004 (sixth bimonthly)
Editorial
Read features, interviews, first-person essays, profiles, other features about people in a wide variety of fields, along with information on journals & institutions in the topic of MEMS.
July 2005
Dr. Yu-Chong Tai
June 2005
Dr. Younan Xia
May 2005
Professor Chih-Ming Ho
April 2005
Sensors and Actuators A: Physical
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U

Overview

The last decade has seen dramatic advances in creation and miniaturization in the science and technology of Microelectromechanical Systems (MEMS). MEMS combine mechanical and electrical properties in devices that can be fabricated using the batch-processing technology of integrated circuits. The ultimate goal is to have MEMS on a nanoscale, and the first such devices are now dominating the Special Topics list of the hottest papers in the field.

The 10-year and two-year rankings reflect the movement of this technology from concept to reality. The 10-year ranking is dominated by reviews of the technologies necessary for creating MEMS—soft lithography, which is the #1 paper for the decade, micromachining, photoresists, and three-dimensional self-assembly techniques. Other hot papers in the 10-year ranking review the materials of MEMS and the unique quantum mechanical and physical properties of phenomena at these nanometer scales.

The ranking of the hottest papers over the past two years still includes reviews of the methodologies for creating, testing, and studying MEMS devices, but the list is dominated by descriptions of specific devices, beginning with the hottest paper, which describes a fully synthetic nanoscale rotational actuator. Other hot papers discuss the electromechanical properties of thin-film piezoelectrics, the use of nanobelts as cantilevers, and the development of MEMS switches, optical lenses, and tunable filters. Also appearing in the two-year rankings are articles discussing the nuances of specific MEMS applications, such as drug-delivery components, small-volume chemistry, and nucleic acid and antibody assays.

Methodology

To construct this database, papers were extracted based on topic-search-supplied keywords for MEMS. The keywords used were as follows: 

MEMS
--OR--
microelectromechanical system*

The baseline time span for this database is 1994-2004 (sixth bimonthly. The resulting database contained 3,906 (10 years) and  1,823 (2 years) papers; 8,497 authors; 57 countries; 606 journals; and 1,638 institutions.

Rankings

Once the database was in place, it was used to generate the lists of top 20 papers (two, and ten years periods), authors, journals, institutions, and nations, covering a time span of 1994-2004 (sixth bimonthly).

The top 20 papers are ranked according to total cites. Rankings for author, journal, institution, and country are listed in three ways: according to total cites, total papers, and total cites/paper. The paper thresholds and corresponding percentages used to determine scientist, institution, country, and journal rankings according to total cites/paper, and total papers respectively are as follows:

Entity: Scientists Institutions Countries Journals
Thresholds: 5 8 7 6
Percentage: 1% 1% 50% 20%

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