***Article 1
by Xia, YN
Total Cites: 267
Article Title: SOFT LITHOGRAPHY
Authors: Xia, YN, Whitesides, GM
Journal: ANNUAL REVIEW OF MATERIALS SCIENCE
Volume: 28
Page: 153-184
Year: 1998
Addresses: 
· HARVARD UNIV, Dept Chem & Chem Biol, Cambridge, MA, USA
· HARVARD UNIV, Dept Chem & Chem Biol, Cambridge, MA, USA

***Article 2
Total Cites: 158
Article Title: DIAMOND-LIKE AMORPHOUS CARBON
Authors: Robertson, J
Journal: MATERIALS SCIENCE & ENGINEERING R-REPORTS
Volume: 37
Page: 129-281
Year: 2002
Addresses: 
· UNIV CAMBRIDGE, Dept Engn, Cambridge CB2 1PZ, England
· UNIV CAMBRIDGE, Dept Engn, Cambridge CB2 1PZ, England

***Article 3
with Ho, CM
Total Cites: 153
Article Title: MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS
Authors: Ho, CM, Tai, YC
Journal: ANNUAL REVIEW OF FLUID MECHANICS
Volume: 30
Page: 579-612
Year: 1998
Addresses: 
· UNIV CALIF LOS ANGELES, Dept Mech & Aerosp Engn, Los Angeles, CA, USA
· UNIV CALIF LOS ANGELES, Dept Mech & Aerosp Engn, Los Angeles, CA, USA
· CALTECH, Dept Elect Engn, Pasadena, CA, USA

***Article 4
Total Cites: 108
Article Title: ATOMIC-SCALE FRICTION MEASUREMENTS USING FRICTION FORCE MICROSCOPY .1. GENERAL-PRINCIPLES AND NEW MEASUREMENT TECHNIQUES
Authors: Ruan, JA, Bhushan, B
Journal: JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME
Volume: 116
Page: 378-388
Year: 1994
Addresses: 
· OHIO STATE UNIV, DEPT MECH ENGN, COMP MICROTRIBOL & CONTAMINAT LAB, COLUMBUS, OH, USA

***Article 5
Total Cites: 99
Article Title: FERROELECTRIC THIN FILMS IN MICROELECTROMECHANICAL SYSTEMS APPLICATIONS
Authors: Polla, DL, Francis, LF
Journal: MRS BULLETIN
Volume: 21
Page: 59-65
Year: 1996
Addresses: 
· UNIV MINNESOTA, DEPT ELECT ENGN, 200 UNION ST SE, MINNEAPOLIS, MN, USA
· UNIV MINNESOTA, SCH MED, MINNEAPOLIS, MN, USA
· UNIV MINNESOTA, MICROTECHNOL LAB, MINNEAPOLIS, MN, USA
· UNIV MINNESOTA, DEPT CHEM ENGN & MAT SCI, MINNEAPOLIS, MN, USA

***Article 6
Total Cites: 97
Article Title: RAPID PROTOTYPING OF PATTERNED FUNCTIONAL NANOSTRUCTURES
Authors: Fan, HY, Lu, YF, Stump, A, Reed, ST, Baer, T, Schunk, R, Perez-luna, V, Lopez, GP, Brinker, CJ
Journal: NATURE
Volume: 405
Page: 56-60
Year: 2000
Addresses: 
· SANDIA NATL LAB, POB 5800, Albuquerque, NM, USA
· SANDIA NATL LAB, Albuquerque, NM, USA
· UNIV NEW MEXICO, Ctr Microengineered Mat, Albuquerque, NM, USA
· UNIV NEW MEXICO, Dept Chem & Nucl Engn, Albuquerque, NM, USA

***Article 7
Total Cites: 92
Article Title: QUANTUM MECHANICAL ACTUATION OF MICROELECTROMECHANICAL SYSTEMS BY THE CASIMIR FORCE
Authors: Chan, HB, Aksyuk, VA, Kleiman, RN, Bishop, DJ, Capasso, F
Journal: SCIENCE
Volume: 291
Page: 1941-1944
Year: 2001
Addresses: 
· AT&T, Lucent Technol, 600 Mt Ave, Murray Hill, NJ, USA
· AT&T, Lucent Technol, Murray Hill, NJ, USA

***Article 8
of SENSORS AND ACTUATORS A-PHYSICAL
Total Cites: 92
Article Title: HIGH-ASPECT-RATIO, ULTRATHICK, NEGATIVE-TONE NEAR-UV PHOTORESIST AND ITS APPLICATIONS FOR MEMS
Authors: Lorenz, H, Despont, M, Fahrni, N, Brugger, J, Vettiger, P, Renaud, P
Journal: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 64
Page: 33-39
Year: 1998
Addresses: 
· ECOLE POLYTECH FED LAUSANNE, DMT IMS, CH-1015 Lausanne, Switzerland
· ECOLE POLYTECH FED LAUSANNE, DMT IMS, CH-1015 Lausanne, Switzerland
· IBM CORP, Div Res, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland

***Article 9
Total Cites: 91
Article Title: ORGANOMETALLIC CHEMISTRY ON SILICON SURFACES: FORMATION OF FUNCTIONAL MONOLAYERS BOUND THROUGH SI-C BONDS
Authors: Buriak, JM
Journal: CHEMICAL COMMUNICATIONS
Volume: 
Page: 1051-1060
Year: 1999
Addresses: 
· PURDUE UNIV, Dept Chem, Brown Labs 1393, W Lafayette, IN, USA
· PURDUE UNIV, Dept Chem, Brown Labs 1393, W Lafayette, IN, USA

***Article 10
Total Cites: 91
Article Title: SURFACE ENGINEERING AND MICROTRIBOLOGY FOR MICROELECTROMECHANICAL SYSTEMS
Authors: Komvopoulos, K
Journal: WEAR
Volume: 200
Page: 305-327
Year: 1996
Addresses: 
· UNIV CALIF BERKELEY, DEPT MECH ENGN, BERKELEY, CA, USA

***Article 11
Total Cites: 89
Article Title: NANOCRYSTALLINE DIAMOND FILMS
Authors: Gruen, DM
Journal: ANNUAL REVIEW OF MATERIALS SCIENCE
Volume: 29
Page: 211-259
Year: 1999
Addresses: 
· ARGONNE NATL LAB, Div Chem & Mat Sci, Argonne, IL, USA
· ARGONNE NATL LAB, Div Chem & Mat Sci, Argonne, IL, USA

***Article 12
Total Cites: 85
Article Title: SU-8: A LOW-COST NEGATIVE RESIST FOR MEMS
Authors: Lorenz, H, Despont, M, Fahrni, N, Labianca, N, Renaud, P, Vettiger, P
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 7
Page: 121-124
Year: 1997
Addresses: 
· Swiss Fed Inst Technol, DMT IMS, CH-1015 LAUSANNE, SWITZERLAND
· IBM CORP, ZURICH RES LAB, CH-8803 RUSCHLIKON, SWITZERLAND
· IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY, USA

***Article 13
Total Cites: 84
Article Title: THREE-DIMENSIONAL SELF-ASSEMBLY OF MILLIMETRE-SCALE COMPONENTS
Authors: Terfort, A, Bowden, N, Whitesides, GM
Journal: NATURE
Volume: 386
Page: 162-164
Year: 1997
Addresses: 
· HARVARD UNIV, DEPT CHEM & CHEM BIOL, CAMBRIDGE, MA, USA

***Article 14
Total Cites: 83
Article Title: ALKYLTRICHLOROSILANE-BASED SELF-ASSEMBLED MONOLAYER FILMS FOR STICTION REDUCTION IN SILICON MICROMACHINES
Authors: Srinivasan, U, Houston, MR, Howe, RT, Maboudian, R
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume: 7
Page: 252-260
Year: 1998
Addresses: 
· UNIV CALIF BERKELEY, Dept Chem Engn, Berkeley, CA, USA
· UNIV CALIF BERKELEY, Dept Chem Engn, Berkeley, CA, USA
· UNIV CALIF BERKELEY, Berkeley Sensor & Actuator Ctr, Berkeley, CA, USA
· UNIV CALIF BERKELEY, Dept Elect Engn & Comp Sci, Berkeley, CA, USA

***Article 15
Total Cites: 82
Article Title: M-TEST: A TEST CHIP FOR MEMS MATERIAL PROPERTY MEASUREMENT USING ELECTROSTATICALLY ACTUATED TEST STRUCTURES
Authors: Osterberg, PM, Senturia, SD
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume: 6
Page: 107-118
Year: 1997
Addresses: 
· MIT, DEPT ELECT ENGN & COMP SCI, CAMBRIDGE, MA, USA

***Article 16
Total Cites: 77
Article Title: PATTERNING LIQUID FLOW ON THE MICROSCOPIC SCALE
Authors: Kataoka, DE, Troian, SM
Journal: NATURE
Volume: 402
Page: 794-797
Year: 1999
Addresses: 
· PRINCETON UNIV, Dept Chem Engn, Princeton, NJ, USA
· PRINCETON UNIV, Dept Chem Engn, Princeton, NJ, USA

***Article 17
Total Cites: 74
Article Title: RAREFACTION AND COMPRESSIBILITY EFFECTS IN GAS MICROFLOWS
Authors: Beskok, A, Karniadakis, GE, Trimmer, W
Journal: JOURNAL OF FLUIDS ENGINEERING-TRANSACTIONS OF THE ASME
Volume: 118
Page: 448-456
Year: 1996
Addresses: 
· BROWN UNIV, CTR FLUID MECH, PROVIDENCE, RI, USA
· BELLE MEAD RES INC, BELLE MEAD, NJ, USA

***Article 18
Total Cites: 74
Article Title: THE FLUID MECHANICS OF MICRODEVICES - THE FREEMAN SCHOLAR LECTURE
Authors: Gad-el-hak, M
Journal: JOURNAL OF FLUIDS ENGINEERING-TRANSACTIONS OF THE ASME
Volume: 121
Page: 12175
Year: 1999
Addresses: 
· UNIV NOTRE DAME, Dept Aerosp & Mech Engn, Notre Dame, IN, USA
· UNIV NOTRE DAME, Dept Aerosp & Mech Engn, Notre Dame, IN, USA

***Article 19
Total Cites: 73
Article Title: SCREAM-I - A SINGLE MASK, SINGLE-CRYSTAL SILICON, REACTIVE ION ETCHING PROCESS FOR MICROELECTROMECHANICAL STRUCTURES
Authors: Shaw, KA, Zhang, ZL, Macdonald, NC
Journal: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 40
Page: 63-70
Year: 1994
Addresses: 
· CORNELL UNIV, SCH ELECT ENGN, ITHACA, NY, USA
· CORNELL UNIV, NATL NANOFABRICAT FACIL, ITHACA, NY, USA

***Article 20
Total Cites: 64
Article Title: SURFACE MICROMACHINING FOR MICROELECTROMECHANICAL SYSTEMS
Authors: Bustillo, JM, Howe, RT, Muller, RS
Journal: PROCEEDINGS OF THE IEEE
Volume: 86
Page: 1552-1574
Year: 1998
Addresses: 
· UNIV CALIF BERKELEY, Berkeley Sensor & Actuator Ctr, Dept Elect Engn & Comp Sci, Berkeley, CA, USA
· UNIV CALIF BERKELEY, Berkeley Sensor & Actuator Ctr, Dept Elect Engn & Comp Sci, Berkeley, CA, USA