Label: XIA-1998
Title: SOFT LITHOGRAPHY
Journal: ANNU REV MATER SCI, vol. 28, p. 153-184, 1998
Citations: 267
Authors: XIA, YN; WHITESIDES, GM
Addresses:
HARVARD UNIV, Dept Chem & Chem Biol, Cambridge, USA
HARVARD UNIV, Dept Chem & Chem Biol, Cambridge, USA

Label: HO-1998
Title: MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS
Journal: ANNU REV FLUID MECH, vol. 30, p. 579-612, 1998
Citations: 153
Authors: HO, CM; TAI, YC
Addresses:
UNIV CALIF LOS ANGELES, Dept Mech & Aerosp Engn, Los Angeles, USA
UNIV CALIF LOS ANGELES, Dept Mech & Aerosp Engn, Los Angeles, USA
CALTECH, Dept Elect Engn, Pasadena, USA

Label: FAN-2000
Title: RAPID PROTOTYPING OF PATTERNED FUNCTIONAL NANOSTRUCTURES
Journal: NATURE, vol. 405, p. 56-60, 2000
Citations: 97
Authors: FAN, HY; LU, YF; STUMP, A; REED, ST; BAER, T; SCHUNK, R; PEREZ-LUNA, V; LOPEZ, GP; BRINKER, CJ
Addresses:
SANDIA NATL LAB, POB 5800, Albuquerque, USA
SANDIA NATL LAB, , Albuquerque, USA
UNIV NEW MEXICO, Ctr Microengineered Mat, Albuquerque, USA
UNIV NEW MEXICO, Dept Chem & Nucl Engn, Albuquerque, USA

Label: LORENZ-1998
Title: HIGH-ASPECT-RATIO, ULTRATHICK, NEGATIVE-TONE NEAR-UV PHOTORESIST AND ITS APPLICATIONS FOR MEMS
Journal: SENSOR ACTUATOR A-PHYS, vol. 64, p. 33-39, 1998
Citations: 92
Authors: LORENZ, H; DESPONT, M; FAHRNI, N; BRUGGER, J; VETTIGER, P; RENAUD, P
Addresses:
ECOLE POLYTECH FED LAUSANNE, DMT IMS, CH-1015 Lausanne, Switzerland
ECOLE POLYTECH FED LAUSANNE, DMT IMS, CH-1015 Lausanne, Switzerland
IBM CORP, Div Res, CH-8803 Ruschlikon, Switzerland

Label: KOMVOPOULOS-1996
Title: SURFACE ENGINEERING AND MICROTRIBOLOGY FOR MICROELECTROMECHANICAL SYSTEMS
Journal: WEAR, vol. 200, p. 305-327, 1996
Citations: 91
Authors: KOMVOPOULOS, K
Addresses:
UNIV CALIF BERKELEY, DEPT MECH ENGN, BERKELEY, USA

Label: LORENZ-1997
Title: SU-8: A LOW-COST NEGATIVE RESIST FOR MEMS
Journal: J MICROMECHANIC MICROENGINEER, vol. 7, p. 121-124, 1997
Citations: 85
Authors: LORENZ, H; DESPONT, M; FAHRNI, N; LABIANCA, N; RENAUD, P; VETTIGER, P
Addresses:
Swiss Fed Inst Technol, DMT IMS, CH-1015 LAUSANNE, SWITZERLAND
IBM CORP, ZURICH RES LAB, CH-8803 RUSCHLIKON, SWITZERLAND
IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, USA

Label: TERFORT-1997
Title: THREE-DIMENSIONAL SELF-ASSEMBLY OF MILLIMETRE-SCALE COMPONENTS
Journal: NATURE, vol. 386, p. 162-164, 1997
Citations: 84
Authors: TERFORT, A; BOWDEN, N; WHITESIDES, GM
Addresses:
HARVARD UNIV, DEPT CHEM & CHEM BIOL, CAMBRIDGE, USA

Label: SRINIVASAN-1998
Title: ALKYLTRICHLOROSILANE-BASED SELF-ASSEMBLED MONOLAYER FILMS FOR STICTION REDUCTION IN SILICON MICROMACHINES
Journal: J MICROELECTROMECHANICAL SYST, vol. 7, p. 252-260, 1998
Citations: 83
Authors: SRINIVASAN, U; HOUSTON, MR; HOWE, RT; MABOUDIAN, R
Addresses:
UNIV CALIF BERKELEY, Dept Chem Engn, Berkeley, USA
UNIV CALIF BERKELEY, Dept Chem Engn, Berkeley, USA
UNIV CALIF BERKELEY, Berkeley Sensor & Actuator Ctr, Berkeley, USA
UNIV CALIF BERKELEY, Dept Elect Engn & Comp Sci, Berkeley, USA

Label: OSTERBERG-1997
Title: M-TEST: A TEST CHIP FOR MEMS MATERIAL PROPERTY MEASUREMENT USING ELECTROSTATICALLY ACTUATED TEST STRUCTURES
Journal: J MICROELECTROMECHANICAL SYST, vol. 6, p. 107-118, 1997
Citations: 82
Authors: OSTERBERG, PM; SENTURIA, SD
Addresses:
MIT, DEPT ELECT ENGN & COMP SCI, CAMBRIDGE, USA

Label: KATAOKA-1999
Title: PATTERNING LIQUID FLOW ON THE MICROSCOPIC SCALE
Journal: NATURE, vol. 402, p. 794-797, 1999
Citations: 77
Authors: KATAOKA, DE; TROIAN, SM
Addresses:
PRINCETON UNIV, Dept Chem Engn, Princeton, USA
PRINCETON UNIV, Dept Chem Engn, Princeton, USA

Label: BESKOK-1996
Title: RAREFACTION AND COMPRESSIBILITY EFFECTS IN GAS MICROFLOWS
Journal: J FLUID ENG, vol. 118, p. 448-456, 1996
Citations: 74
Authors: BESKOK, A; KARNIADAKIS, GE; TRIMMER, W
Addresses:
BROWN UNIV, CTR FLUID MECH, PROVIDENCE, USA
BELLE MEAD RES INC, , BELLE MEAD, USA

Label: GAD-EL-HAK-1999
Title: THE FLUID MECHANICS OF MICRODEVICES - THE FREEMAN SCHOLAR LECTURE
Journal: J FLUID ENG, vol. 121, p. 5-33, 1999
Citations: 74
Authors: GAD-EL-HAK, M
Addresses:
UNIV NOTRE DAME, Dept Aerosp & Mech Engn, Notre Dame, USA
UNIV NOTRE DAME, Dept Aerosp & Mech Engn, Notre Dame, USA

Label: BUSTILLO-1998
Title: SURFACE MICROMACHINING FOR MICROELECTROMECHANICAL SYSTEMS
Journal: PROC IEEE, vol. 86, p. 1552-1574, 1998
Citations: 64
Authors: BUSTILLO, JM; HOWE, RT; MULLER, RS
Addresses:
UNIV CALIF BERKELEY, Berkeley Sensor & Actuator Ctr, Berkeley, USA
UNIV CALIF BERKELEY, Berkeley Sensor & Actuator Ctr, Berkeley, USA